<< Back to Nanoscience at Emory
< Back to Nanolab resources
Confocal Variable Temperature Sputtering System
- One 2" sputtering target and two 1.3" targets in a confocal arrangmeent
- Cosputtering for alloy and compound deposition
- Rf and dc sputtering of metals/insulators
- Sample cooling to 100K
- Rotating sample stage for uniform deposition